Enhanced Cleanroom Air Quality Monitoring for Airborne Molecular Contaminants Using SIFT-MS

Format: On-demand

Duration: Approximately 60 minutes

Presenters:
Vaughan Langford (Director of Applications and Marketing, Syft Technologies)

Yatin Mange (Application Specialist – Semiconductor, Syft Technologies)

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Airborne molecular contaminants (AMCs) cause major product quality issues in modern semiconductor fabrication, even at very low levels (part-per-billion, ppb, concentrations and below). Currently multiple different tools are used to detect certain classes of AMCs with varying degrees of effectiveness.
Selected ion flow tube mass spectrometry (SIFT-MS) is a unique analytical tool that provides comprehensive, high-sensitivity detection of volatile organic, and semivolatile organic compounds (VOCs and SVOCs), and inorganic gases (including HCl, HF, and SOx) within seconds. As a single, comprehensive tool with rapid analysis, SIFT-MS provides great economic benefit because it detects and identifies a wider range of AMCs issues and does so faster. This results in increased product yield and reduced maintenance and replacement in infrastructure.

Please register for this on-demand webinar, which will introduce the SIFT-MS technique, compare performance with other detection technologies, and describe its application to AMC monitoring – from the front-opening unified pod (FOUP) to the cleanroom.

By viewing this on-demand presentation you will learn...

• the fundamentals of the selected ion flow tube mass spectrometry (SIFT-MS) analytical technique
• how SIFT-MS compares with traditional GC-MS analytical methods used for cleanroom and product testing
• how SIFT-MS delivers immediate analytical results for inorganic gases and VOCs, benefiting product quality and reducing frequency of maintenance and repair

SIFT-MS greatly simplifies cleanroom air quality monitoring for the semiconductor and related industries. This webinar will demonstrate how application of SIFT-MS:

• delivers more frequent AMC data for each cleanroom sampling point, providing higher product yield and reduced maintenance and replacement frequencies for manufacturing infrastructure
• simplifies and expands testing of FOUP and other storage/transport containers, improving product quality

To register for this on-demand webinar please complete the form opposite.